SBE1 30 μm Silicon-Based Interdigitated Electrode Capacitive Array with High Precision and High Stability for MEMS Gas and Biosensing Applications - Image 1
360 product view
    Click to enlarge
    SIE1 3μm Silicon-Based Interdigitated Electrode Capacitive Array for MEMS Gas, Biological, Electrochemical, and Photoelectric Sensing Detection
    SIE1 3μm Silicon-Based Interdigitated Electrode Capacitive Array for MEMS Gas, Biological, Electrochemical, and Photoelectric Sensing Detection $33.00
    Back to products
    FIP1 50μm Flexible Interdigitated Electrode PET Capacitive Array for Humidity, Biosensing, Medical, and Smart Wearable Sensor Applications (IDE)
    FIP1 50μm Flexible Interdigitated Electrode PET Capacitive Array for Humidity, Biosensing, Medical, and Smart Wearable Sensor Applications (IDE) $15.00

    SBE1 30 μm Silicon-Based Interdigitated Electrode Capacitive Array with High Precision and High Stability for MEMS Gas and Biosensing Applications

    $29.00

    Size

    Default

    Add to wishlist
    SKU: SBE1 Category:
    Description
    Potentiolab • Silicon-Based Interdigitated Electrode

    30μm Silicon-Based Interdigitated Electrode Capacitive Array

    High-precision 30μm silicon-based interdigitated electrode fabricated using MEMS technology for photoelectric detection, gas-sensitive, humidity-sensitive, biological, chemical, physical, and medical sensor applications.

    30μm IDE PatternMEMS Fabrication

    Cr/Au Electrode

    30 micron silicon based interdigitated electrode capacitive array for MEMS gas humidity biosensors
    silicon based MEMS interdigitated electrode for photoelectric gas humidity biological sensing
    MEMS Silicon-Based Structure
    • Single-crystal silicon substrate
    • Surface-grown SiO₂ insulating layer
    • SiO₂ thickness: 300nm
    • Suitable for MEMS sensor fabrication
    30μm Interdigitated Pattern
    • Line width: 30μm
    • Line spacing: 30μm
    • Finger length: 1.5mm
    • 20 pairs / 40 fingers
    Cr/Au Metal Layer
    • Metal layer structure: Cr/Au
    • Cr thickness: 10nm
    • Au thickness: 100nm
    • Stable conductive performance
    Wide Operating Temperature
    • Operating temperature: -150°C to 500°C
    • Excellent thermal stability
    • Reliable sensing performance
    • Suitable for harsh laboratory environments
    Typical Applications
    • Photoelectric detection systems
    • Gas-sensitive MEMS sensors
    • Humidity-sensitive sensors
    • Biological and electrochemical sensing
    • Chemical, physical, and medical sensor research
    ItemSpecification
    Product Name30μm Silicon-Based Interdigitated Electrode Capacitive Array
    SubstrateSingle-crystal silicon
    Insulating LayerSurface-grown SiO₂, 300nm
    Overall Size4mm × 7mm × 0.52mm
    Line Width30μm
    Line Spacing30μm
    Finger Length1.5mm
    Interdigitated Pairs20 pairs / 40 fingers
    Metal Layer StructureCr/Au
    Metal Layer ThicknessCr 10nm / Au 100nm
    Operating Temperature-150°C to 500°C
    Product Advantages
    This silicon-based MEMS interdigitated electrode features a high-precision 30μm IDE structure, SiO₂-insulated single-crystal silicon substrate, and Cr/Au conductive layer system. It is suitable for photoelectric detection, gas-sensitive, humidity-sensitive, biological, electrochemical, chemical, physical, and medical sensing applications requiring reliable performance and stable quality.
    Precautions
    • Handle carefully to avoid scratching the electrode surface.
    • Avoid mechanical impact or excessive force on the silicon substrate.
    • Clean gently with suitable laboratory-grade solvents before use.
    • Store in a clean, dry, and dust-free environment.
    • Custom electrode dimensions and patterns are available upon request.
    Reviews (0)

    Reviews

    There are no reviews yet.

    Be the first to review “SBE1 30 μm Silicon-Based Interdigitated Electrode Capacitive Array with High Precision and High Stability for MEMS Gas and Biosensing Applications”

    Your email address will not be published. Required fields are marked *

    Shipping and Delivery

    Worldwide Shipping

    Potentiolab ships electrochemical electrodes, electrochemical cells, and laboratory accessories to universities, research institutes, and laboratories worldwide. Orders are shipped primarily via FedEx International Priority (occasionally DHL or UPS) with full tracking. In-stock items are typically dispatched within one business day. Estimated delivery times are 4–6 working days for Asia, 5–7 working days for Europe and North America, and 7–9 working days for other regions. Customs clearance times may vary by country.

    Rates, Support & Orders

    Shipping fees start from USD 28, with free shipping available on qualifying orders over USD 1800. Prices exclude VAT, customs duties, or local taxes, which are the responsibility of the recipient. For bulk orders, custom electrochemical products, academic discounts, or institutional purchasing requirements, please contact our sales team at sales@potentiolab.com.

    Related products

    BSW1 BST Silicon Wafer Tweezers – Anti-Magnetic, Anti-Static, Wear-Resistant Semiconductor Wafer Tweezers with Wide Tip, Fine Tip & Curved Tip Options

    Price range: $10.00 through $12.00
    Potentiolab • BST Silicon Wafer Tweezers BST Silicon Wafer Tweezers – Anti-Magnetic & Anti-Static Precision Laboratory Tweezers Precision BST wafer
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    FPI1 100 μm Flexible PET Interdigitated Electrode Capacitive Array Gas/Bio/Humidity Sensor Chip

    $15.00
    Potentiolab • Flexible Interdigitated Electrode Sensor Chip 100 μm Flexible PET Interdigitated Electrode Capacitive Sensor Chip A 100 μm flexible
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    PPT1 Pure PTFE Teflon Tip Tweezers – Acid Resistant, Heat Resistant and Anti-Scratch Tweezers for Wafer and Chip Handling

    Price range: $41.00 through $54.00
    Potentiolab • PTFE Teflon Tip Tweezers Pure PTFE Teflon Tip Tweezers – Acid Resistant Laboratory Tweezers High-performance PTFE / Teflon
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    PTW1 PTFE Teflon Wafer Tweezers – Chemical Resistant Tweezers for Semiconductor Silicon Wafer Handling

    Price range: $38.00 through $117.00
    Potentiolab • PTFE Wafer Tweezers PTFE Teflon Wafer Tweezers – Chemical Resistant Tweezers for Semiconductor Silicon Wafer Handling High-performance PTFE
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    PWJ1 PTFE Wide-Jaw Wafer Tweezers for Semiconductor Wafers, Glass Substrates and Chip Handling

    $82.00
    Potentiolab • PTFE Wafer Tweezers Anti-Static PTFE Wide-Jaw Wafer Tweezers for Semiconductor and Glass Substrate Handling High-quality anti-static PTFE wafer
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    TAR1 PTFE Teflon Tweezers – Acid Resistant, High Temperature & Aqua Regia Resistant Wafer Tweezers

    Price range: $40.00 through $46.00
    Potentiolab • PTFE / Teflon Laboratory Tweezers PTFE Teflon Tweezers – Acid Resistant High Temperature Aqua Regia Resistant Wafer Tweezers
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    WTP1 Wide-Tip PTFE Reverse Tweezers – Self-Locking Teflon Tweezers for Wafer and Laboratory Handling

    $54.00
    Potentiolab • PTFE Reverse Tweezers Wide-Tip PTFE Reverse Tweezers – Self-Locking Teflon Tweezers for Wafer and Laboratory Handling High-performance PTFE
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    WTT1 PTFE Wide-Tip Tweezers for Semiconductor Wafers – Anti-Static, Acid & Aqua Regia Resistant

    Price range: $82.00 through $100.00
    Potentiolab • PTFE Wide-Tip Tweezers PTFE Wide-Tip Tweezers for Semiconductor Wafers – Anti-Static, Acid & Aqua Regia Resistant High-performance PTFE
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view