MSI1 Micro-Capacitive Single-Channel Interdigitated Electrode for MEMS Optical, Gas, Biosensor and Photoelectric Detection Applications - Image 1
360 product view
    Click to enlarge
    CIE1 50μm Ceramic Interdigitated Electrode (IDE) Capacitive Array Chip for Biosensing, Gas and Humidity Sensor Applications
    CIE1 50μm Ceramic Interdigitated Electrode (IDE) Capacitive Array Chip for Biosensing, Gas and Humidity Sensor Applications Price range: $17.00 through $29.00
    Back to products
    CAS1 Customizable Aluminum Sheet Electrode for Counter Electrode and Working Electrode Laboratory Applications
    CAS1 Customizable Aluminum Sheet Electrode for Counter Electrode and Working Electrode Laboratory Applications Price range: $4.00 through $50.00

    MSI1 Micro-Capacitive Single-Channel Interdigitated Electrode for MEMS Optical, Gas, Biosensor and Photoelectric Detection Applications

    Price range: $23.00 through $27.00

    Size

    5 µm Gap

    ,

    10 µm Gap – Type A

    ,

    10 µm Gap – Type B

    ,

    20 µm Gap

    Add to wishlist
    SKU: MSI1 Category:
    Description

    Potentiolab • MEMS Interdigitated Electrode

    Micro Capacitive Single-Channel Interdigitated Electrode for MEMS, Optical & Sensor Applications

    High-precision MEMS micro capacitive interdigitated electrodes
    designed for optical sensing, MEMS devices, chemical sensors,
    physical sensors, biosensors, medical sensors, and electrochemical research    .
    Multiple electrode gap versions are available, including 5 μm, 10 μm, and 20 μm,
    providing stable sensing performance and excellent microfabrication accuracy.


    MEMS Sensor


    Cr / Au IDE


    5 μm / 10 μm / 20 μm

    Gap 5 μm MEMS interdigitated electrode
    Gap 5 μm IDE detail
    Gap 10 μm-A MEMS IDE
    Gap 10 μm-A IDE detail
    Gap 10 μm-B MEMS IDE
    Gap 10 μm-B IDE detail
    Gap 20 μm MEMS IDE
    Gap 20 μm IDE detail

    Available Models
    • Model 1: Gap-5 μm
    • Model 2: Gap-10 μm-A
    • Model 3: Gap-10 μm-B
    • Model 4: Gap-20 μm
    Silicon-Based Structure
    • Single crystal silicon substrate (P-type)
    • Thermally grown SiO₂ insulation layer
    • SiO₂ thickness: 300 nm
    • Excellent electrical insulation stability

    Cr / Au Metal Layer
    • Metal layer: Cr / Au
    • Cr thickness: 30 nm
    • Au thickness: 100 nm
    • Reliable conductivity and stability
    High Temperature Stability
    • Operating temperature: -150°C ~ 500°C
    • Suitable for harsh environments
    • Excellent thermal stability
    • Compatible with MEMS sensor research

    Typical Applications
    • MEMS sensor development
    • Optical and capacitive sensing
    • Chemical and physical sensors
    • Medical and biosensor applications
    • Microelectronic and electrochemical research

    SpecificationAll Models
    Overall Size4 mm × 7 mm × 0.52 mm
    Electrode Gap Options5 μm / 10 μm / 20 μm
    Substrate MaterialSingle Crystal Silicon (P-type)
    SiO₂ Thickness300 nm
    Metal Layer StructureCr / Au
    Metal Thickness30 nm / 100 nm
    Operating Temperature-150°C ~ 500°C

    These MEMS micro capacitive interdigitated electrodes combine
    silicon-based microfabrication technology, ultra-fine electrode gaps,
    and stable Cr/Au conductive layers to provide reliable performance
    for optical sensing, capacitive sensing, chemical sensing, and medical sensor research.

    Note: Custom electrode spacing, chip dimensions, and metal layer structures are available upon request.

    Reviews (0)

    Reviews

    There are no reviews yet.

    Be the first to review “MSI1 Micro-Capacitive Single-Channel Interdigitated Electrode for MEMS Optical, Gas, Biosensor and Photoelectric Detection Applications”

    Your email address will not be published. Required fields are marked *

    Shipping and Delivery

    Worldwide Shipping

    Potentiolab ships electrochemical electrodes, electrochemical cells, and laboratory accessories to universities, research institutes, and laboratories worldwide. Orders are shipped primarily via FedEx International Priority (occasionally DHL or UPS) with full tracking. In-stock items are typically dispatched within one business day. Estimated delivery times are 4–6 working days for Asia, 5–7 working days for Europe and North America, and 7–9 working days for other regions. Customs clearance times may vary by country.

    Rates, Support & Orders

    Shipping fees start from USD 28, with free shipping available on qualifying orders over USD 1800. Prices exclude VAT, customs duties, or local taxes, which are the responsibility of the recipient. For bulk orders, custom electrochemical products, academic discounts, or institutional purchasing requirements, please contact our sales team at sales@potentiolab.com.

    Related products

    LSC1 100 μm Large-Size Ceramic Interdigitated Electrode Capacitive Array Sensor Chip for Gas, Humidity and Biosensing (10 × 20 mm)

    Potentiolab • Ceramic Interdigitated Electrode 100 μm Large-Size Ceramic Interdigitated Electrode Capacitive Array Sensor Chip for Gas, Humidity & Biosensors
    Add to wishlist
    Read more
    Quick view

    PPT1 Pure PTFE Teflon Tip Tweezers – Acid Resistant, Heat Resistant and Anti-Scratch Tweezers for Wafer and Chip Handling

    Price range: $41.00 through $54.00
    Potentiolab • PTFE Teflon Tip Tweezers Pure PTFE Teflon Tip Tweezers – Acid Resistant Laboratory Tweezers High-performance PTFE / Teflon
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    RAP1 Reverse Action PTFE Tweezers – Acid Resistant Teflon Tweezers for Semiconductor Wafer Handling

    Price range: $54.00 through $67.00
    Potentiolab • PTFE / Teflon Laboratory Tweezers Reverse Action PTFE Tweezers for Semiconductor Wafer and Laboratory Handling High-performance PTFE /
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    RIE1 Platinum Interdigitated Electrode (Pt IDE) on Quartz Glass for Gas, Humidity, Biosensor, MEMS, Photoelectric Detection, and Electrochemical Applications

    Price range: $37.00 through $41.00
    Potentiolab • Platinum Interdigitated Electrode Platinum Interdigitated Electrode Pt IDE on Quartz Glass for Gas, Humidity & Biosensor Applications High-performance
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    TTF1 PTFE Teflon Tweezers – F4 Chemical Resistant Tweezers for Wafer and Semiconductor Handling

    Price range: $48.00 through $65.00
    Potentiolab • PTFE Chemical Resistant Tweezers PTFE Teflon Tweezers – F4 Chemical Resistant Tweezers for Wafer and Semiconductor Handling High-performance
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    WTA1 PTFE Wafer Tweezers – Acid & Alkali Resistant Teflon Tweezers for Semiconductor Silicon Wafers and Chips

    $96.00
    Potentiolab • PTFE / Teflon Wafer Tweezers PTFE Wafer Tweezers – Acid & Alkali Resistant Teflon Tweezers for Semiconductor Wafers
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    WTR1 Wide Tip Reverse Action PTFE Tweezers – Self-Locking Teflon Wafer Tweezers with Flat Tips

    Price range: $54.00 through $69.00
    Potentiolab • PTFE Reverse Action Tweezers Wide-Tip Reverse Action PTFE Tweezers – Self-Locking Teflon Wafer Tweezers with Flat Tips High-performance
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view

    WTT1 PTFE Wide-Tip Tweezers for Semiconductor Wafers – Anti-Static, Acid & Aqua Regia Resistant

    Price range: $82.00 through $100.00
    Potentiolab • PTFE Wide-Tip Tweezers PTFE Wide-Tip Tweezers for Semiconductor Wafers – Anti-Static, Acid & Aqua Regia Resistant High-performance PTFE
    Add to wishlist
    Select options This product has multiple variants. The options may be chosen on the product page
    Quick view