SBC1 20μm Silicon-Based Interdigitated Electrode Capacitive Array MEMS Gas and Biosensor for Photoelectric Detection with High Stability - Image 1
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    SBC1 20μm Silicon-Based Interdigitated Electrode Capacitive Array MEMS Gas and Biosensor for Photoelectric Detection with High Stability

    $31.00

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    Description
    Potentiolab • Silicon-Based Interdigitated Electrode

    20μm Single-Crystal Silicon Interdigitated Electrode MEMS Sensor Chip

    High-precision 20μm single-crystal silicon interdigitated electrode designed for MEMS gas, humidity, biological, chemical, physical, and medical sensor chip applications.

    20μm IDE Pattern
    Single-Crystal Silicon
    Ti/Au Electrode
    20 micron single crystal silicon interdigitated electrode MEMS gas humidity biosensor chip
    silicon based interdigitated electrode capacitive array for MEMS gas humidity and biological sensors
    High-Precision IDE Structure
    • Line width: 20μm
    • Line spacing: 20μm
    • Finger length: 1.6mm
    • 30 pairs / 60 fingers
    Single-Crystal Silicon Substrate
    • Single-crystal silicon electrode substrate
    • Surface-grown SiO₂ insulating layer
    • SiO₂ thickness: 300nm
    • Suitable for MEMS sensor chip integration
    Ti/Au Metal Layer
    • Metal layer structure: Ti/Au
    • Ti thickness: 30nm
    • Au thickness: 100nm
    • Stable conductive performance
    Wide Operating Temperature
    • Operating temperature: -150°C to 500°C
    • Excellent thermal stability
    • Reliable sensing performance
    • Suitable for demanding laboratory environments
    Typical Applications
    • MEMS gas sensors
    • Humidity-sensitive sensors
    • Biological sensor chips
    • Chemical and physical sensors
    • Medical sensor research
    ItemSpecification
    Product Name20μm Single-Crystal Silicon Interdigitated Electrode
    Overall Size4mm × 7mm × 0.52mm
    Line Width20μm
    Line Spacing20μm
    Finger Length1.6mm
    Interdigitated Pairs30 pairs / 60 fingers
    SubstrateSingle-crystal silicon
    Insulating LayerSurface-grown SiO₂, 300nm
    Metal Layer StructureTi/Au
    Metal Layer ThicknessTi 30nm / Au 100nm
    Operating Temperature-150°C to 500°C
    Product Advantages
    This high-precision single-crystal silicon interdigitated electrode features a 20μm IDE structure, SiO₂-insulated silicon substrate, and Ti/Au conductive layer system. It is suitable for MEMS gas, humidity, biological, chemical, physical, and medical sensing applications requiring reliable performance and stable quality.
    Precautions
    • Handle carefully to avoid scratching the electrode surface.
    • Avoid mechanical impact or excessive force on the silicon substrate.
    • Clean gently with suitable laboratory-grade solvents before use.
    • Store in a clean, dry, and dust-free environment.
    • Custom electrode dimensions and patterns are available upon request.
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    Potentiolab ships electrochemical electrodes, electrochemical cells, and laboratory accessories to universities, research institutes, and laboratories worldwide. Orders are shipped primarily via FedEx International Priority (occasionally DHL or UPS) with full tracking. In-stock items are typically dispatched within one business day. Estimated delivery times are 4–6 working days for Asia, 5–7 working days for Europe and North America, and 7–9 working days for other regions. Customs clearance times may vary by country.

    Rates, Support & Orders

    Shipping fees start from USD 28, with free shipping available on qualifying orders over USD 1800. Prices exclude VAT, customs duties, or local taxes, which are the responsibility of the recipient. For bulk orders, custom electrochemical products, academic discounts, or institutional purchasing requirements, please contact our sales team at sales@potentiolab.com.

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